01
Tool lineup
CW-R60 cleanroom handling robot
Six-axis robot that moves FOUPs, process kits, and chamber parts inside the cleanroom.
- Payload 60 kg
- Repeatability ±0.05 mm
- Low-particle seals and covers
CW-L silicon carbide lapping abrasive
Graded silicon carbide grit for double-side wafer lapping and edge grinding.
- Grit F240–F1200
- 10 kg · 25 kg bags
- Test report per lot
CW-I3 macro inspection system
Automated optical inspection that finds scratches, particles, and edge chips after each process step.
- Defects from 2 µm
- 120 wafers per hour
- 200 · 300 mm
CW-DP dry vacuum pump
Oil-free screw pump for load locks and etch chambers.
- Pumping speed 100–600 m³/h
- Ultimate pressure 1 Pa
- Power 3.5 kW
CW-EC electrostatic chuck
Ceramic chuck that holds the wafer flat during etch and deposition.
- Alumina ceramic
- Helium backside cooling
- 300 mm
02
Specifications
| Model | Type | Wafer size | Key rating | Footprint |
|---|---|---|---|---|
| CW-R60 | Handling robot | 200 · 300 mm | Payload 60 kg | 1.2 × 1.0 m |
| CW-I3 | Macro inspection | 200 · 300 mm | 120 wafers/h | 1.6 × 1.4 m |
| CW-DP400 | Dry screw pump | — | 400 m³/h | 0.9 × 0.5 m |
| CW-EC300 | Electrostatic chuck | 300 mm | Helium cooling | Ø 300 mm |
03
Where our tools run
Power device fab
A 200 mm power-device line added two CW-I3 systems after polishing and cut wafers scrapped at final test by 18% in six months.
Memory back end
A packaging plant moves FOUPs between stockers and grinders with CW-R60 robots on three shifts, with no wafers carried by hand.
04
Questions engineers ask
Can you fit a tool into our existing bay?
Yes. Send the bay drawing and utility points, and we propose a layout with service clearances before you order.
How fast do spare parts arrive?
Common spares ship from stock within 24 hours, and every tool comes with a recommended spare-parts list.
Do you test tools before shipping?
Each tool runs a factory acceptance test on your wafers or ours, and the report ships with the tool.
Talk to our applications team
- fab@example.com
- Phone
- +1 555 0128
- Hours
- Mon–Fri 8:00–18:00